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Micro process engineering: fundamentals, devices, fabrication, and application

By: Kockmann, Norbert., ed.
Publisher: Germany Wiley-Vch Verlag Gmbh & co 2006Description: v.5(xxii, 507 p.).ISBN: 9783527312467.Subject(s): Manufacturing processDDC classification: 670
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Books in Stacks (S) Books in Stacks (S) Technology Library
General Section
670 MIC (Browse shelf) 5 Available 251214

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