| 000 -LEADER |
|---|
| fixed length control field |
00446nam a2200145Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
180712s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783527312467 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
670 |
| Author Mark |
MIC |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Kockmann, Norbert., ed. |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Micro process engineering: fundamentals, devices, fabrication, and application |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Germany |
| Name of publisher, distributor, etc. |
Wiley-Vch Verlag Gmbh & co |
| Date of publication, distribution, etc. |
2006 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
v.5(xxii, 507 p.) |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Manufacturing process |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| item type |
Books in Stacks (S) |
