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Kockmann, Norbert., ed.

Micro process engineering: fundamentals, devices, fabrication, and application - Germany Wiley-Vch Verlag Gmbh & co 2006 - v.5(xxii, 507 p.)

ISBN: 9783527312467

Subjects--Topical Terms:
Manufacturing process

Dewey Class. No.: 670 / MIC

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