Plasma electronics : applications in microelectronic device fabrication /T.Makabe, Z.Petrovic
By: Makabe, T | Petrovic Z.
Series: Series in plasma physics. Publisher: New York Taylor & Francis 2006Description: 338 p.ISBN: 750309768.Subject(s): Plasma engineering | Electronic books
DDC classification: 621.044
| Item type | Current location | Collection | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
Books in Stacks (S)
|
Engineering Library Science & Technology | S | 621.044 MAK (Browse shelf) | Available | 255585 |
Includes index.
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