Makabe, T. Petrovic Z.
Plasma electronics : applications in microelectronic device fabrication /T.Makabe, Z.Petrovic - New York Taylor & Francis 2006 - 338 p. - Series in plasma physics .
Includes index.
750309768
Plasma engineering
Electronic books
621.044 / MAK
Plasma electronics : applications in microelectronic device fabrication /T.Makabe, Z.Petrovic - New York Taylor & Francis 2006 - 338 p. - Series in plasma physics .
Includes index.
750309768
Plasma engineering
Electronic books
621.044 / MAK