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Tribology in chemical-mechanical planarization /Hong Liang, David Craven

By: Liang, Hong | Craven, David.
Publisher: Boca Raton Taylor 7 Francis 2005Description: 185p.ISBN: 824725670.Subject(s): TribologyDDC classification: 621.92
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Item type Current location Collection Call number Status Date due Barcode
Books in Stacks (S) Books in Stacks (S) Engineering Library
Science & Technology
S 621.92 LIA (Browse shelf) Available 256003


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