Tribology in chemical-mechanical planarization (Record no. 46710)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00548nam a2200205Ia 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20200807140458.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 180712s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 824725670 |
| 041 ## - LANGUAGE | |
| Language of text/sound track | English |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.92 |
| Author Mark | LIA |
| DDC Edition number | 23 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Liang, Hong |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Craven, David |
| 245 ## - TITLE STATEMENT | |
| Title | Tribology in chemical-mechanical planarization |
| Statement of responsibility, etc. | /Hong Liang, David Craven |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Boca Raton |
| Name of publisher, distributor, etc. | Taylor 7 Francis |
| Date of publication, distribution, etc. | 2005 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 185p. |
| 500 ## - GENERAL NOTE | |
| General note | Includex Reference and Index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Tribology |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| item type | Books in Stacks (S) |
| Withdrawn status | Lost status | Damaged status | Not for loan | Permanent Location | Current Location | Shelving location | Date acquired | Source of acquisition | Price | Full call number | Accession Number | Date last seen | item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Engineering Library | Engineering Library | Science & Technology | 2018-07-13 | Not Known | 0.00 | 621.92 LIA | 256003 | 2018-07-13 | Books in Stacks (S) |