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Thin films material technology : sputtering of compound materials / Kiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi

By: Wasa, Kiyotaka | Kitabatake, Makoto | Adachi, Hideaki.
Publisher: New York William Andrew 2004Description: xiv, 518 p.ISBN: 815514832.Subject(s): SputteringDDC classification: 620.11
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Item type Current location Collection Call number Status Date due Barcode
Books in Stacks (S) Books in Stacks (S) Engineering Library
Science & Technology
S 620.11 WAS (Browse shelf) Available 250998
Books in Stacks (S) Books in Stacks (S) Engineering Library
Science & Technology
S 620.11 WAS (Browse shelf) Available 250997

Includes appendix and index

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