Wasa, Kiyotaka Kitabatake, Makoto Adachi, Hideaki
Thin films material technology : sputtering of compound materials / Kiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi - New York William Andrew 2004 - xiv, 518 p.
Includes appendix and index
815514832
Sputtering
620.11 / WAS
Thin films material technology : sputtering of compound materials / Kiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi - New York William Andrew 2004 - xiv, 518 p.
Includes appendix and index
815514832
Sputtering
620.11 / WAS