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GATE dielectric integrity; material, process, and tool qualification / edited by Dinesh C.Gupta., George A.Brown

Publisher: West conshohocken American society for testing and materials 2000Description: 169 p.ISBN: 803126158.Subject(s): Integrated circuits, Dielectrics, SemiconductorsDDC classification: 621.3815

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Books in Stacks (S)	Main Library Science & Technology	621.3815 GAT (Browse shelf)	Available		147038

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Includes appendix.

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