000 -LEADER |
fixed length control field |
00644nam a2200181Ia 4500 |
005 - DATE AND TIME OF LATEST TRANSACTION |
control field |
20211229151211.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
180712s9999 xx 000 0 und d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
803126158 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.3815 |
Author Mark |
GAT |
DDC Edition number |
23 |
245 ## - TITLE STATEMENT |
Title |
GATE dielectric integrity; material, process, and tool qualification / |
Statement of responsibility, etc. |
edited by Dinesh C.Gupta., George A.Brown |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
West conshohocken |
Name of publisher, distributor, etc. |
American society for testing and materials |
Date of publication, distribution, etc. |
2000 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
169 p. |
500 ## - GENERAL NOTE |
General note |
Includes appendix. |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Integrated circuits, Dielectrics, Semiconductors |
700 ## - ADDED ENTRY--PERSONAL NAME |
9 (RLIN) |
119893 |
Personal name |
Gupta, Dinesh C. |
Role |
Editor |
700 ## - ADDED ENTRY--PERSONAL NAME |
9 (RLIN) |
119894 |
Personal name |
Brown, George A. |
Role |
Editor |
942 ## - ADDED ENTRY ELEMENTS (KOHA) |
item type |
Books in Stacks (S) |