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Fundamentals of microfabrication / Marc Madou

By: Madou, Marc.
Publisher: Boca Raton CRC Press 1997Description: 592 p.ISBN: 849394511.Subject(s): Semiconductors | Microelectronics-design and construction | Lasers-Industrial applications | MicrofabricationDDC classification: 621.38152
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Item type Current location Collection Call number Status Notes Date due Barcode
Books in Reference (R) Books in Reference (R) Engineering Library
Science & Technology
R 621.38152 MAD (Browse shelf) Available ENG 244774

Includes references and index

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