| 000 -LEADER |
|---|
| fixed length control field |
00652nam a2200229Ia 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20200728123139.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
180712s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
849394511 |
| 041 ## - LANGUAGE |
|---|
| Language of text/sound track |
English |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Author Mark |
MAD |
| DDC Edition number |
23 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Madou, Marc |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Fundamentals of microfabrication |
| Statement of responsibility, etc. |
/ Marc Madou |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Boca Raton |
| Name of publisher, distributor, etc. |
CRC Press |
| Date of publication, distribution, etc. |
1997 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
592 p. |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics-design and construction |
| 9 (RLIN) |
103138 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Lasers-Industrial applications |
| 9 (RLIN) |
103139 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microfabrication |
| 9 (RLIN) |
102699 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| item type |
Books in Reference (R) |
