Jones, Anthony C., ed. Hitchman, Michael L., ed.
Chemical vapour deposition: precursors, processes and applications - Cambridge Royal Society of Chemistry 2009 - xv, 582 p.
Includes index.
9780854044658
620.11 / CHE
Chemical vapour deposition: precursors, processes and applications - Cambridge Royal Society of Chemistry 2009 - xv, 582 p.
Includes index.
9780854044658
620.11 / CHE