| 000 | 00732nam a2200229Ia 4500 | ||
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| 999 |
_c71361 _d71361 |
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| 005 | 20201230151503.0 | ||
| 008 | 180710s9999 xx 000 0 und d | ||
| 041 | _aEN | ||
| 082 |
_a629.135 _bMEM _223 |
||
| 245 |
_aMems and microstructures in aerospace applications _c/by Robert Osiander, M. Ann Garrison Darrin, John L. Champion |
||
| 260 |
_aBoca Raton _bTaylor & Francis _c2006 |
||
| 300 | _a384 p. | ||
| 500 | _a includes index | ||
| 509 | _aNS | ||
| 650 | _aAeronautical instruments | ||
| 650 | 4 |
_aAerospace Engineering _9323 |
|
| 650 | 0 |
_aMicroelectromechanical systems _9102963 |
|
| 700 |
_946824 _aOsiander, Robert. ed. |
||
| 700 |
_9106091 _aDarrin Garrison Ann.M |
||
| 700 |
_9106092 _aChampion John.L |
||
| 942 | _cS | ||