000 00390nam a2200157Ia 4500
008 180712s9999 xx 000 0 und d
020 _a750304952
082 _a621.55
_bCHA
100 _aCHAMBERS, A.
245 _aBasic vacuum technology
250 _a2nd ed.
260 _aBristol
_bInstitute of Physics pub.
_c1998
300 _axiv, 189 p.
650 _aVacuum technology
942 _cR
999 _c5401
_d5401