| 000 | 00548nam a2200205Ia 4500 | ||
|---|---|---|---|
| 999 |
_c46710 _d46710 |
||
| 005 | 20200807140458.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a824725670 | ||
| 041 | _aEN | ||
| 082 |
_a621.92 _bLIA _223 |
||
| 100 | _aLiang, Hong | ||
| 100 | _a Craven, David | ||
| 245 |
_aTribology in chemical-mechanical planarization _c/Hong Liang, David Craven |
||
| 260 |
_aBoca Raton _bTaylor 7 Francis _c2005 |
||
| 300 | _a185p. | ||
| 500 | _a Includex Reference and Index | ||
| 509 | _aNS | ||
| 650 | _aTribology | ||
| 942 | _cS | ||