| 000 | 00610nam a2200205Ia 4500 | ||
|---|---|---|---|
| 999 |
_c46614 _d46614 |
||
| 005 | 20210129124050.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a9780521821728 | ||
| 041 | _aEN | ||
| 082 |
_a621.366 _bGRI _223 |
||
| 100 | _aGrigoropoulos, Costas P. | ||
| 245 |
_aTransport in laser microfabrication _c/ Costas P. Grigoropoulos _b: fundamentals and applications |
||
| 260 |
_aCambridge _bCambridge University Press _c2009 |
||
| 300 | _axii, 400 p. | ||
| 500 | _a Includes references and index. | ||
| 509 | _aNS | ||
| 650 | _aLasers | ||
| 650 | 0 |
_a Microfabrication _9102699 |
|
| 942 | _cS | ||