000 | 00604nam a2200217Ia 4500 | ||
---|---|---|---|
999 |
_c43416 _d43416 |
||
005 | 20210201153447.0 | ||
008 | 180712s9999 xx 000 0 und d | ||
020 | _a849391393 | ||
041 | _aEN | ||
082 |
_a621.381 _bMEM _223 |
||
245 | 4 |
_aThe mems handbook _c/Edited by Mohamed Gad-el-Hak _b: applications |
|
260 |
_aLondon _bBoca Raton _c2006 |
||
300 | _averiable pages | ||
500 | _ancludes index | ||
509 | _aNS | ||
650 | _aMicroelectromechanical systems | ||
650 | 4 |
_aDetectors _94640 |
|
650 | 0 |
_a Microactuators _9102883 |
|
700 |
_9102885 _aGad-el-Hak, Mohamed. _eedt |
||
942 | _cR |