| 000 | 00670nam a2200229Ia 4500 | ||
|---|---|---|---|
| 999 |
_c3503 _d3503 |
||
| 005 | 20200727141235.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a1402080204 | ||
| 041 | _aEN | ||
| 082 |
_a621.3815 _bJOH _223 |
||
| 100 | _aJohnstone, Robert W. | ||
| 100 | _a Parameswaran, M. | ||
| 245 | 3 |
_aAn introduction to surface-micromachining _c/ Robert W. Johnstone; M.Parameswaran |
|
| 260 |
_aBoston _bKluwer Academic publishers _c2004 |
||
| 300 | _ax, 186 p. | ||
| 509 | _aNS | ||
| 650 | _aEngineering | ||
| 650 | 0 |
_a Mechanical engineering _9103040 |
|
| 650 | 0 |
_a Computer engineering _9103041 |
|
| 650 | 0 |
_aSystems engineering _9103042 |
|
| 942 | _cS | ||