| 000 | 00639nam a2200229Ia 4500 | ||
|---|---|---|---|
| 999 |
_c31883 _d31883 |
||
| 005 | 20200720104152.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a750309768 | ||
| 041 | _aEN | ||
| 082 |
_a621.044 _bMAK _223 |
||
| 100 | _aMakabe, T. | ||
| 100 | _aPetrovic Z. | ||
| 245 |
_aPlasma electronics _b: applications in microelectronic device fabrication _c/T.Makabe, Z.Petrovic |
||
| 260 |
_aNew York _bTaylor & Francis _c2006 |
||
| 300 | _a338 p. | ||
| 440 | _aSeries in plasma physics | ||
| 500 | _aIncludes index. | ||
| 509 | _aNS | ||
| 650 | _aPlasma engineering | ||
| 650 | 4 |
_aElectronic books _95650 |
|
| 942 | _cS | ||