| 000 | 00446nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a9783527312467 | ||
| 082 |
_a670 _bMIC |
||
| 100 | _aKockmann, Norbert., ed. | ||
| 245 | _aMicro process engineering: fundamentals, devices, fabrication, and application | ||
| 260 |
_aGermany _bWiley-Vch Verlag Gmbh & co _c2006 |
||
| 300 | _av.5(xxii, 507 p.) | ||
| 650 | _aManufacturing process | ||
| 942 | _cS | ||
| 999 |
_c27179 _d27179 |
||