000 | 00556nam a2200205Ia 4500 | ||
---|---|---|---|
999 |
_c26953 _d26953 |
||
005 | 20201230151548.0 | ||
008 | 180712s9999 xx 000 0 und d | ||
020 | _a1580535364 | ||
041 | _aEN | ||
082 |
_a681.2 _bMEM _223 |
||
100 | _aBeeby, Stephen... [et.al.] | ||
245 |
_aMems mechanical sensors _c/by Stephen Beeby... [et.al.] |
||
260 |
_aBoston _bAetech House _c2004 |
||
300 | _aix, 269 p. | ||
500 | _aIncludes references and index | ||
509 | _aNS | ||
650 | _aMicroelectronical system | ||
650 | 4 |
_aEngineering _95872 |
|
942 | _cR |