| 000 | 00520nam a2200193Ia 4500 | ||
|---|---|---|---|
| 999 |
_c26952 _d26952 |
||
| 005 | 20201230151400.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a72393912 | ||
| 041 | _aEN | ||
| 082 |
_a621.381 _bHSU _223 |
||
| 100 | _aHsu, Tai-Ran | ||
| 245 |
_aMems & Mictosystems _c/by Tai-Ran Hsu _b: design and manufacture |
||
| 260 |
_aBoston _bMcGraw-hill _c2002 |
||
| 300 | _axii, 436 p. | ||
| 500 | _aIncludes bibliographical references and index. | ||
| 509 | _aNS | ||
| 650 | _aElectronics | ||
| 942 | _cR | ||