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_c21831 _d21831 |
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| 041 | _aEN | ||
| 082 |
_a621.381 _bINT _223 |
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| 245 |
_aIntroduction and fundamentals-MEMS handbook _c/ edited by Mohamed Gad-el-Hak |
||
| 260 |
_aBoca Raton _bTaylor & Francis _c2006 |
||
| 300 | _avaried pages. | ||
| 509 | _aNS | ||
| 650 | _aElectronic engineering | ||
| 700 |
_9102913 _a Gad-el-Hak, Mohamed., ed. |
||
| 942 | _cS | ||