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| 041 | _aEN | ||
| 082 |
_a621.044 _bHAN _223 |
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| 245 |
_aHandbook of advanced plasma processing techniques _c/ edited by R.J.Shul, S.J.Pearton |
||
| 260 |
_aNew York _bSpringer _c2000 |
||
| 300 | _axiv, 653 p. | ||
| 509 | _aNS | ||
| 650 | _aPlasma engineering | ||
| 700 |
_951968 _aShul, R.J., ed. _eedt |
||
| 700 |
_9102233 _aPearton, S.J. _eedt |
||
| 942 | _cS | ||