| 000 | 00652nam a2200229Ia 4500 | ||
|---|---|---|---|
| 999 |
_c17198 _d17198 |
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| 005 | 20200728123139.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a849394511 | ||
| 041 | _aEN | ||
| 082 |
_a621.38152 _bMAD _223 |
||
| 100 | _aMadou, Marc | ||
| 245 |
_aFundamentals of microfabrication _c/ Marc Madou |
||
| 260 |
_aBoca Raton _bCRC Press _c1997 |
||
| 300 | _a592 p. | ||
| 500 | _aIncludes references and index | ||
| 509 | _aNS | ||
| 650 | _aSemiconductors | ||
| 650 | 0 |
_a Microelectronics-design and construction _9103138 |
|
| 650 | 0 |
_aLasers-Industrial applications _9103139 |
|
| 650 | 0 |
_a Microfabrication _9102699 |
|
| 942 | _cR | ||