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Handbook of advanced plasma processing techniques / edited by R.J.Shul, S.J.Pearton

by Shul, R.J., ed [Editor] | Pearton, S.J [Editor].

Publisher: New York Springer 2000Availability: Items available for loan: Engineering Library [Call number: 621.044 HAN] (1).

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Plasma electronics : applications in microelectronic device fabrication /T.Makabe, Z.Petrovic

by Makabe, T | Petrovic Z.

Publisher: New York Taylor & Francis 2006Availability: Items available for loan: Engineering Library [Call number: 621.044 MAK] (1).

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