Liang, Hong Craven, David <br/><br/>
Tribology in chemical-mechanical planarization 
/Hong Liang, David Craven 
 - Boca Raton  Taylor 7 Francis  2005 
 - 185p. 
<br/><br/>  <br/>Includex Reference and Index 
<br/><br/><label>ISBN: </label>824725670 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Tribology
<br/><br/><label>Dewey Class. No.: </label>621.92  / LIA