Wasa, Kiyotaka Kitabatake, Makoto Adachi, Hideaki

Thin films material technology : sputtering of compound materials / Kiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi - New York William Andrew 2004 - xiv, 518 p.

Includes appendix and index

815514832


Sputtering

620.11 / WAS