Makabe, T. Petrovic Z. <br/><br/>
Plasma electronics  : applications in microelectronic device fabrication 
/T.Makabe, Z.Petrovic  
 - New York  Taylor & Francis  2006 
 - 338 p. 
 - Series in plasma physics .
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>750309768 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering<br/>Electronic books
<br/><br/><label>Dewey Class. No.: </label>621.044  / MAK