Micromechanics and mems  : classic and seminal papers to 1990 
/edited William S.Trimmer 
 - New York  Institute of Electrical and Electronics Engineers  1997 
 - xv, 701 p. 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>780310853 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronic<br/>Electronic engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / MIC