Kockmann, Norbert., ed. <br/><br/>
Micro process engineering: fundamentals, devices, fabrication, and application 

 - Germany  Wiley-Vch Verlag Gmbh & co  2006 
 - v.5(xxii, 507 p.) 
<br/><br/><label>ISBN: </label>9783527312467 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Manufacturing process
<br/><br/><label>Dewey Class. No.: </label>670  / MIC