Hsu, Tai-Ran <br/><br/>
Mems & Mictosystems  : design and manufacture 
/by Tai-Ran Hsu 
 - Boston  McGraw-hill  2002 
 - xii, 436 p. 
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>72393912 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics
<br/><br/><label>Dewey Class. No.: </label>621.381  / HSU