Introduction and fundamentals-MEMS handbook 
/ edited by Mohamed Gad-el-Hak 
 - Boca Raton  Taylor & Francis  2006 
 - varied pages. 
<br/><br/><label>ISBN: </label>849391377 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / INT