Handbook of advanced plasma processing techniques 
/ edited by R.J.Shul, S.J.Pearton 
 - New York  Springer  2000 
 - xiv, 653 p. 
<br/><br/><label>ISBN: </label>3540667725 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering
<br/><br/><label>Dewey Class. No.: </label>621.044  / HAN