GATE dielectric integrity; material, process, and tool qualification / 
edited by Dinesh C.Gupta., George A.Brown 
 - West conshohocken  American society for testing and materials  2000 
 - 169 p. 
<br/><br/> Includes appendix. 
<br/><br/><label>ISBN: </label>803126158 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits, Dielectrics, Semiconductors
<br/><br/><label>Dewey Class. No.: </label>621.3815  / GAT