May, Gray S. Sze, Simon M. <br/><br/>
Fundamentals of semiconductor fabrication 
/ by] Gary S.May, Simon M.Sze 
 - Singapore  John Wiley & Sons (Asia)  2004 
 - xiii, 305 p. 
<br/><br/> Includes appendixes and index 
<br/><br/><label>ISBN: </label>981253072X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors-Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAY