Madou, Marc <br/><br/>
Fundamentals of microfabrication 
/ Marc Madou 
 - Boca Raton  CRC Press  1997 
 - 592 p. 
<br/><br/> Includes references and index 
<br/><br/><label>ISBN: </label>849394511 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors<br/> Microelectronics-design and construction<br/>Lasers-Industrial applications<br/> Microfabrication
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAD