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The Science and engineering of microelectronic fabrication /Stephen A.Campbel

By: Campbell, Stephen A.
Publisher: New York Oxford University Press 2001Edition: 2nd ed.Description: xiv, 603 p.ISBN: 195136055.Subject(s): Electronic engineeringDDC classification: 621.381
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Item type Current location Collection Call number Status Date due Barcode
Books in Reference (R) Books in Reference (R) Engineering Library
Science & Technology
R 621.381 CAM (Browse shelf) Available 244787


Includes appendex and index.

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