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MEMS: design and fabrication

By: Gad-el-Hak, Mohamed., ed.
Publisher: Boca Raton Taylor & Francis 2006Edition: 2nd ed.Description: variged pagings.ISBN: 849391385.Subject(s): MicrofabricationDDC classification: 621.381
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621.381 MIC (Browse shelf) Available 255832

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