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Fundamentals of semiconductor fabrication / by] Gary S.May, Simon M.Sze

By: May, Gray S | Sze, Simon M.
Publisher: Singapore John Wiley & Sons (Asia) 2004Description: xiii, 305 p.ISBN: 981253072X.Subject(s): Semiconductors-Design and constructionDDC classification: 621.38152
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Item type Current location Collection Call number Status Notes Date due Barcode
Books in Reference (R) Books in Reference (R) Engineering Library
Science & Technology
R 621.38152 MAY (Browse shelf) Available ENG 190153

Includes appendixes and index

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