The mems handbook : applications
/Edited by Mohamed Gad-el-Hak
- London Boca Raton 2006
- veriable pages
ncludes index
849391393
Microelectromechanical systems
Detectors
Microactuators
621.381 / MEM
ncludes index
849391393
Microelectromechanical systems
Detectors
Microactuators
621.381 / MEM