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Beeby, Stephen... [et.al.]

Mems mechanical sensors /by Stephen Beeby... [et.al.] - Boston Aetech House 2004 - ix, 269 p.

Includes references and index

ISBN: 1580535364

Subjects--Topical Terms:
Microelectronical system
Engineering

Dewey Class. No.: 681.2 / MEM

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